Description
Rotatable targets are specially shaped sputtering targets that are manufactured as cylindrical or tubular bodies. In contrast to classic planar targets, they enable large-area, uniform coating, especially with rotating cathode systems. The external geometry is precisely adapted to the requirements of the respective coating systems.
Form
Cylindrical or tubular
Uniform wall thickness (straight) or larger outer diameter at the ends (dogbone)
Available as monolithic, sprayed or bonded materials (e.g. metals or ceramics)
Typical dimensions: customizable depending on the system and application
BENEFITS
High material utilization
By rotating the target during the sputtering process, the target material is used more efficiently than with planar targets.
Homogeneous layer thickness
The rotation improves the homogeneity of the deposited layers on the substrate.
Longer service life
Reduced time for target change and longer operating cycles increase productivity.
Large coating areas
Ideal for industrial high-volume and flat glass coating
Flexible choice of material
Available in metals, alloys, oxides, nitrides and other composite materials
Applications
Architectural Glass & Automotive Glass
Architectural Glass, Automotive Glass, Solar Glass, Displays, Smart Glass
Electronics & Semiconductors
Optoelectronics, Advanced Packaging, Power Electronics, Photonics
Photovoltaics
Thin-Film Photovoltaics (z. B. CIGS, CdTe)
